Design and Analysis of Stress Distribution In V-Beam Electrothermal Actuator

Abstract

This work isfocused on the Design and Analysis of MEMS Thermal Actuators. Thermal actuators are used in various applications such as micro grippers, micro mirror and switching application by applying voltage. It is preferred because the performance of thermal actuator is powerful. It works on the principle that when voltage is applied current flows through the beam and it produces displacement stress and that displacement helps us to grip the micro objects. Goal of this work is to reduce the stress because if stress is high, the micro object will be damaged. If the object is damaged, it will increase the expense of the experiment. So, this analysis and experiment is to reduce the stress by reducing the stress we can reduce the expense and we can make reuse of the object. The material used is Aluminium. The input voltage of 0.2 V is given and displacement obtained is 8.0046×104 µm.