A study of Time Variable Multiple Objectives scheduler for wafer fabrication

Lee Yen-Fei, J. Zhibin, Zhang Huai, Ko Chen-Pin, M. Z. Darudin, Yi Deer
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引用次数: 1

Abstract

Wafer fabrication (Fab) is a typical large-scale complicated manufacturing system. With the enhancement of modern Fab's automation, one of important techniques is to determine lot priority index to meet multiple objectives. Usually different objectives may be paid diverse emphases which are represented by weights. In today's highly dynamic manufacturing environment, weights of each individual objective may change along with time, and corresponding scheduling may be regarded as the time-variable-multiple-objectives (TVMO) scheduling. The proposed TVMO algorithm presents a practical and useful way to find out trade-off between better optimality for computation, which is essential for real-time response to changes in Foundry fab.
晶圆制造的时变多目标调度研究
晶圆制造是典型的大型复杂制造系统。随着现代工厂自动化程度的提高,确定多目标的优先级指标是重要的技术之一。通常不同的目标可以有不同的侧重点,用权重表示。在当今高度动态的制造环境中,各个目标的权重会随着时间的变化而变化,相应的调度可以看作是时变多目标调度。所提出的TVMO算法提供了一种实用而有用的方法来权衡更好的计算最优性,这对于实时响应晶圆厂的变化至关重要。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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