T. Braun, O. Hölck, M. Voitel, Mattis Obst, S. Voges, K. Becker, R. Aschenbrenner, M. Schneider-Ramelow
{"title":"A Closer Look to Fan-out Panel Level Packaging","authors":"T. Braun, O. Hölck, M. Voitel, Mattis Obst, S. Voges, K. Becker, R. Aschenbrenner, M. Schneider-Ramelow","doi":"10.1109/EDTM55494.2023.10102969","DOIUrl":null,"url":null,"abstract":"Fan-out Wafer and Panel Level Packaging are two of the dominating trends in microelectronics packaging. Both approaches with different flavors as RDL last face-up or face-down have reached maturity and are introduced in high volume manufacturing. This paper discusses warpage in detail as one key challenge in fan-out packaging and how to influence the warpage during processing of a reconfigured panel for Chip first / RDL last approach.","PeriodicalId":418413,"journal":{"name":"2023 7th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)","volume":"20 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2023-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2023 7th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/EDTM55494.2023.10102969","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Fan-out Wafer and Panel Level Packaging are two of the dominating trends in microelectronics packaging. Both approaches with different flavors as RDL last face-up or face-down have reached maturity and are introduced in high volume manufacturing. This paper discusses warpage in detail as one key challenge in fan-out packaging and how to influence the warpage during processing of a reconfigured panel for Chip first / RDL last approach.