Decreasing the Actuation Voltage in Electrowetting on Dielectric With Thin and Micro-Structured Dielectric

Abstract

This work presents the analysis of the minimum actuation voltage $V_{\min}$ for droplet actuation with electrowetting on dielectric (EWOD). First, the fundamentals of electrowetting are described. In the second chapter, the impact on the actuation voltage in EWOD is shown by a dielectric deposited with atomic layer deposition (ALD) and micro-structured surface. In the last part, results of a simulation with COMSOL MultiphysicsOR are presented to verify the hypothesis and a short discussion about the results is given.