Heat-Resistance of Mo/Si Multilayer EUV Mirrors with Interleaved Carbon Barrier-Layers

Abstract

Introducing interleaved carbon barrier-layers improves the heat resistance of Mo/Si multilayers . The soft x-ray reflectivities of the multilayers were calculated, and the effects of heating on both the reflectivities and layer structures of Mo/C/Si/C and Mo/Si multilayers were investigated using x-ray diffraction and transmission electron microscopy. The results show that, for applications using intense soft x-ray beams, Mo/Si multilayers with interleaved carbon barrier-layers are better mirrors than Mo/Si multilayers because they have much better heat resistance and almost the same EUV reflectivity.