V. Afanas’ev, L. G. Lobanova, D. N. Selyakov, M. A. Semenov-Shefov
{"title":"Application of methods used in electron spectroscopy spectra interpretation to ion spectroscopy signals analysis","authors":"V. Afanas’ev, L. G. Lobanova, D. N. Selyakov, M. A. Semenov-Shefov","doi":"10.1117/12.2623922","DOIUrl":null,"url":null,"abstract":"The boundary value problem for the equation of proton transport in solids is solved on the basis of the invariant imbedding method. The equation obtained for the reflection function (in the small-angle approximation), coincided with the equation that was used for electron scattering and was solved on the basis of the OKG method. The obtained solutions for the reflection functions describe well all the features of the experimental data. Satisfactory agreement of calculations with experimental data is shown.","PeriodicalId":388511,"journal":{"name":"International Conference on Micro- and Nano-Electronics","volume":"71 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-01-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Conference on Micro- and Nano-Electronics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2623922","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
The boundary value problem for the equation of proton transport in solids is solved on the basis of the invariant imbedding method. The equation obtained for the reflection function (in the small-angle approximation), coincided with the equation that was used for electron scattering and was solved on the basis of the OKG method. The obtained solutions for the reflection functions describe well all the features of the experimental data. Satisfactory agreement of calculations with experimental data is shown.