Ultra high performance gas sensor based on IC compatible fusion of micromachined hotplatform and nanostructured porous film

Abstract

Ultra-high performances of low power, high sensitivity, and fast response was achieved in a novel micro/nano gas sensor that fused a microhotplatform (MHP) and a monolayer of ordered porous SnO2 nanofilm. Based on the MHP with a platinum microheater and interdigital electrode (IDE), a highly ordered SnO2 porous film was in-situ synthesized using a polystyrene sphere monolayer colloidal crystal template. Test results indicated that the sensor was sensitive to 100 ppb ethanol with a sensitivity of 1.6 (Rair/Rgas), a power consumption of 25 mW and a response time less than 2 s. The detection limit of the sensor was calculated as 9 ppb.