The influence of charge carrier quantum transport and isoenergy surface anisotropy on the high-frequency conductivity of a semiconductor nanolayer

O. Savenko, I. A. Kuznetsova
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Abstract

A theoretical model of the high-frequency electrical conductivity of a semiconductor nanolayer is constructed within the framework of the quantum theory of transport phenomena. The layer thickness can be comparable to and less than the de Broglie wavelength of charge carriers. The isoenergy surface has the shape of an ellipsoid of revolution, the main axis of which is parallel to the layer plane. Analytical expressions are derived for the conductivity tensor components as a function of dimensionless thickness, electric field frequency, chemical potential, ellipticity parameter, and surface roughness parameters. The dependences of the longitudinal and transverse conductivity tensor components on the above parameters are analyzed. The results are compared for the cases of a degenerate and non-degenerate electron gas. A comparative analysis of theoretical calculations with known experimental data for a silicon film is performed.
载流子量子输运和等能表面各向异性对半导体纳米层高频电导率的影响
在输运现象的量子理论框架内,建立了半导体纳米层高频电导率的理论模型。层厚度可与载流子的德布罗意波长相当或小于。等能面为主轴平行于层平面的旋转椭球面形状。推导了电导率张量分量与无量纲厚度、电场频率、化学势、椭圆度参数和表面粗糙度参数的函数表达式。分析了纵向和横向电导率张量分量对上述参数的依赖关系。对简并电子气和非简并电子气的结果进行了比较。对硅膜的理论计算与已知实验数据进行了比较分析。
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