Design and prototyping of a MEMS-oriented distributed feed-back processor

Abstract

This paper presents a novel architecture of a distributed processor for sensor feedback control of a fully integrated MEMS (microelectromechanical systems). The architecture enables one to produce versatile processors with minimal number of transistors and wirings for communication. A micro conveyance system which conveys an object of different shape in different directions is adopted for demonstration. Prototyping using high capacity programmable logic devices (PLDs) and experiments with real images show that the architecture is perfectly suitable for distributed MEMS.