Packaging technology for high performance CMOS server Fujitsu GS8900

A. Fujisaki, M. Suzuki, H. Yamamoto
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引用次数: 8

Abstract

Corresponding to high performance single-chip CPUs adopting 0.18 um process and copper wiring, high density wiring and multi terminal MCMs, on which the CPU and large capacity second caches can be mounted up to 4 pairs, have been newly developed. As for LSIs, bare chips are directly mounted on MCM substrates with 153 um pitch high density area bumps. The maximum LSI terminal count is more than 10,000. LSIs are connected to one another by multi layer high density fine pitch wiring, which are all made of copper and formed in thin films of MCM substrates. The supporting technologies, such as a high density multi terminal connector for the MCM, and a multi layer system mother board of high speed signal transmission correspondence where 16 CPUs and 64 GB main memories can be mounted for a maximum configuration, have been developed. Meanwhile, two kinds of newly developed lead free solders are applied in the system packaging considering of the environment protection. The following two methods have been developed in cooling technique. The high performance thermosyphon has been developed and adopted in the general air-cooled system. Moreover, in order to draw out the performance to its maximum by using the characteristics of CMOS LSI, a low temperature liquid cooling method, using a coolant around 0 degrees C, has been newly adopted to practical use in the large-scale system. With the liquid cooling scheme, not only the installation and maintainability are realized being equal to that for air-cooling, but also high reliability is achieved by a redundant cooling system that cools two or more MCMs.
富士通GS8900高性能CMOS服务器封装技术
与采用0.18 um制程和铜线的高性能单片CPU相对应,新开发了高密度布线和多端子mcm,最多可安装4对CPU和大容量第二缓存。至于lsi,裸片直接安装在具有153um间距高密度面积凸起的MCM基板上。最大LSI终端数大于1万个。lsi通过多层高密度细间距布线相互连接,这些布线均由铜制成,形成在MCM衬底的薄膜中。开发了MCM的高密度多端子连接器和可最大配置16个cpu和64gb主存的高速信号传输通信的多层系统母板等配套技术。同时,从环保的角度出发,将两种新开发的无铅焊料应用于系统封装。在冷却技术中发展了以下两种方法。高性能热虹吸已被开发并应用于一般的风冷系统中。此外,为了充分利用CMOS集成电路的特性,将其性能发挥到最大,在大规模系统中采用了一种新的低温液体冷却方法,即使用0℃左右的冷却剂。采用液冷方案,不仅实现了与风冷方案相当的安装和可维护性,而且通过冗余冷却系统为两台或多台mcm冷却,实现了高可靠性。
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