Preparation and characterization of PBNN multilayer piezoelectric actuator

Abstract

The preparation and characterization of multilayer actuators with fifty layers (100 /spl mu/m in thickness) of piezoelectric [(Pb/sub (1-x/)Ba/sub x/)/sub 6-y/(NaLi)/sub y/Nb/sub 10/O/sub 30/] (PBNN) were reported, which were prepared by tape-casting and cofired with internal Pd30+Ag70 electrodes. The PBNN wafers prepared by the tape-casting technique were compared with those prepared by conventional dry-pressure techniques. Delaminations occurring in the layers of some actuators were observed and discussed. The obtained high linearity and low hysteresis in the displacement-applied field, the symmetric displacement under positive and negative applied field, were discussed in relation to the crystal and domain structure.