Magnetic micro-actuator

[1991] Proceedings. IEEE Micro Electro Mechanical Systems Pub Date : 1991-01-30 DOI:10.1109/MEMSYS.1991.114781

K. Yanagisawa, A. Tago, T. Ohkubo, H. Kuwano

引用次数: 26

Abstract

The characteristics of three types of magnetic microactuators made by silicon-based microfabrication are described. The microfabrication, actuator configuration, and dynamic characteristics of a fabricated microactuator with a planar coil are examined. This microactuator is shown to operate in the nanometer range. It has a conical soft-magnetic tip 10 microns high with a one-turn copper coil. This actuator will be applied to microvalves, micropumps, and microsyringes.<>

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磁micro-actuator

介绍了硅基微加工技术制备的三种磁性微执行器的特点。研究了平面线圈微致动器的微加工、微致动器结构和微致动器的动态特性。该微致动器可在纳米范围内工作。它有一个10微米高的圆锥形软磁尖端和一个一圈铜线圈。该执行器将应用于微阀，微泵和微注射器。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

[1991] Proceedings. IEEE Micro Electro Mechanical Systems

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