Broadband characterization of on-chip RF spiral inductor using multi-line TRL calibration

Abstract

We demonstrate characterization of an on-chip spiral inductor up to 40 GHz based on a one-tier multi-line TRL method and compare it with a conventional two-tier method. We provide details of the calibration standard design. Monte-Carlo based uncertainty analyses demonstrate the repeatability of the measurement results. A comparison of the measurement results with full-wave simulation results shows good agreement.