Cycle Time Perspectives for Small Transfer Batch Size

Abstract

This paper discusses advantages and disadvantages of smaller transfer batch size in an automated semiconductor factory. A framework is suggested by which the "theoretical" cycle time is determined from the point-of-view of the wafer, not the lot. Using this framework, we then look at the possible application of a "virtual cluster tool" by identifying requirements on the process times and transport system. Benefits and risks are then discussed for the approach, using a simple example