Advancing foundry technology with scaling and innovations

Abstract

Being the dedicated IC foundry, TSMC provides a complete portfolio of technologies covering leading-edge technology, specialty technology, and 3D IC system integration technology to fulfill customer product needs in various market segments. While the leading-edge CMOS technology continues to extend Moore's law as a driver for business growth, More-than-Moore specialty technology leverages the logic technology platform with value-added components to enable various functionalities for a wide range of applications. In this paper, the evolution of advanced CMOS technology is reviewed. Challenges in scaling transistor, SRAM and interconnect are discussed. Examples of specialty technology will also be illustrated.