ESD robust 800V SCR-JFET with p+ ballast structure

Abstract

ESD robustness enhancement study of an 800V JFET including the SCR structure is conducted. A p+ ballast structure is introduced in the device and ESD robustness improvement is demonstrated with 3D TCAD simulations. Based on the TCAD study results, a ballasted device is fabricated and improved ESD performance is successfully obtained.