Short Flow Characterization Vehicle (Test Chip) Usage in Advanced Technology Development and Yield Improvement

Abstract

Short flow Characterization Vehicles® can be used at early development phase and offer short learning cycles. Their main usage is to support patterning scheme, validate and freeze design rules, identify and solve major integration and process issues. They have been proven to work for BEOL, FEOL, MOL, and for BEOL-integrated embedded memory elements.