A Piezoelectric Micro-Gripper with Large Working Stroke and Integrated Force Sensor for Optical Fiber Manipulation

2022 16th Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA) Pub Date : 2022-10-11 DOI:10.1109/SPAWDA56268.2022.10045852

Hao Liu, Jian-ping Li

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Abstract

A piezoelectric micro-gripper with large working stroke and integrated force sensor for optical fiber manipulation has been proposed in this study. The two-grade displacement amplifier with both bridge-type flexure mechanism and leverage flexure mechanism is applied to enlarge the working stroke of the piezoelectric stack. The structure and working principle of the two-grade displacement amplifier is investigated. A force sensor with four strain gauges is integrated with the flexure mechanism to measure the pinching force. FEM (Finite element method) is utilized to calculate the working stroke of the proposed two-grade displacement amplifier. A prototype has been manufactured and the experimental setup has been established to investigate the working performance. Experimental results indicate that the motion displacement between the two gripper ends of the proposed piezoelectric micro-gripper is L=212 μm in the case that the driving voltage for the piezoelectric stack is 100 V; the linear coefficient of correlation between the output force and output voltage of the force sensor is R2=0.99963. The observation under a microscopy confirms the feasibility of the two-grade displacement amplifier mechanism and the integrated force sensor for piezoelectric micro-grippers.

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一种用于光纤操作的大行程集成力传感器压电微夹持器

提出了一种具有大工作行程和集成力传感器的用于光纤操作的压电微夹持器。采用桥式柔性机构和杠杆式柔性机构相结合的两级位移放大器，扩大了压电堆的工作行程。研究了两级位移放大器的结构和工作原理。一个带有四个应变片的力传感器与弯曲机构集成以测量夹紧力。采用有限元法计算了所提出的两级位移放大器的工作行程。制作了样机并建立了实验装置，对其工作性能进行了研究。实验结果表明，当压电堆驱动电压为100 V时，所设计的压电微夹持器两端夹持器之间的运动位移为L=212 μm;力传感器输出力与输出电压的线性相关系数R2=0.99963。显微镜下的观察证实了两级位移放大机构和集成力传感器用于压电微夹持器的可行性。

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2022 16th Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA)

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