Thick aluminum nitride contour-mode resonators mitigate thermoelastic damping

C. Cassella, G. Piazza
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引用次数: 4

Abstract

We demonstrate that the use of thick AlN films in Very-High-Frequency (VHF) contour-mode resonators (CMRs) enables a reduction of thermoelastic damping (TED) occurring in the metallic layers sandwiching the AlN film. This technique leads to a large improvement of the device quality factor (Q increase >72%) with respect to thin-film counterparts, resulting into the highest Q ever measured in air (4980) for CMRs operating in the same frequency range. This novel approach to reduce TED in AlN CMRs simultaneously enables a similar Q but a five times larger kt2 than previously demonstrated AlN resonators using electrodes suspended over the AlN film.
厚氮化铝轮廓模谐振器减轻热弹性阻尼
我们证明了在甚高频(VHF)等高线模谐振器(cmr)中使用厚AlN薄膜可以减少夹在AlN薄膜的金属层中发生的热弹性阻尼(TED)。与薄膜器件相比,该技术大大提高了器件质量因子(Q增加>72%),导致在相同频率范围内工作的cmr在空气中测量到的最高Q(4980)。这种新颖的方法可以减少AlN cmr中的TED,同时实现类似的Q,但kt2比先前演示的AlN谐振器大5倍,使用悬浮在AlN薄膜上的电极。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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