{"title":"Thick aluminum nitride contour-mode resonators mitigate thermoelastic damping","authors":"C. Cassella, G. Piazza","doi":"10.1109/FCS.2016.7546790","DOIUrl":null,"url":null,"abstract":"We demonstrate that the use of thick AlN films in Very-High-Frequency (VHF) contour-mode resonators (CMRs) enables a reduction of thermoelastic damping (TED) occurring in the metallic layers sandwiching the AlN film. This technique leads to a large improvement of the device quality factor (Q increase >72%) with respect to thin-film counterparts, resulting into the highest Q ever measured in air (4980) for CMRs operating in the same frequency range. This novel approach to reduce TED in AlN CMRs simultaneously enables a similar Q but a five times larger kt2 than previously demonstrated AlN resonators using electrodes suspended over the AlN film.","PeriodicalId":122928,"journal":{"name":"2016 IEEE International Frequency Control Symposium (IFCS)","volume":"102 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2016-05-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2016 IEEE International Frequency Control Symposium (IFCS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/FCS.2016.7546790","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 4
Abstract
We demonstrate that the use of thick AlN films in Very-High-Frequency (VHF) contour-mode resonators (CMRs) enables a reduction of thermoelastic damping (TED) occurring in the metallic layers sandwiching the AlN film. This technique leads to a large improvement of the device quality factor (Q increase >72%) with respect to thin-film counterparts, resulting into the highest Q ever measured in air (4980) for CMRs operating in the same frequency range. This novel approach to reduce TED in AlN CMRs simultaneously enables a similar Q but a five times larger kt2 than previously demonstrated AlN resonators using electrodes suspended over the AlN film.