Technological parameters scaling influence on the analog performance of Graded-Channel SOI nMOSFET transistors

Abstract

This paper aims at analyzing, through two-dimensional numerical simulations and experimental results, the influence of technological parameters downscaling on the analog performance of Graded-Channel FD SOI nMOSFET transistors. Front gate oxide and silicon film thicknesses, channel doping concentration, total channel and lightly doped region lengths have been varied to target the highest intrinsic voltage gain.