Optimized CMP operation by extended X-factor theory including offline unit hour

Abstract

We focus on operator efficiency in the CMP (chemical mechanical polishing) operation, which, as a typical manually operated tool, influences cycle time. The main purpose is to optimize CMP operation by using online/offline unit hour analysis and X-factor theory, and describe the relationship between operator headcount and cycle time. The online/offline unit hour analysis has been designed to optimize operator allocation and headcount in our production line in order to archive the shortest cycle time.