Influence of annealing in deposited Ti-Pt thin films sensing elements for quartz crystals microbalances

2023 IEEE 10th International Workshop on Metrology for AeroSpace (MetroAeroSpace) Pub Date : 2023-06-19 DOI:10.1109/MetroAeroSpace57412.2023.10189942

Elimar Vieira Vaz Junior, Chiara Martina, B. Saggin, Riccardo Gerosa, E. Zampetti, Maria Aurora Mancuso, A. Longobardo, E. Palomba, F. Dirri, C. Gisellu, D. Scaccabarozzi

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Abstract

This work discusses the effect of annealing heat treatment on deposited thin films for quartz crystal microbalances (QCMs), intended to be used for thermogravimetric analysis at high temperatures. The developed QCMs comprise embedded deposited resistors that can be employed either as heaters or temperature sensors, which are manufactured by particle vapor deposition of a bilayer of Ti-Pt microfilm. There is evidence in the literature that the annealing heating treatment affects the electrical resistance and the thermal coefficient of resistance (TCR) of this type of microfilm, especially in high-temperature ranges. It was found that for the analyzed conditions, i.e. with annealing temperatures varying between 250°C and $350^{\circ}\mathrm{C}$, a general increase of the TCR is obtained, providing an improvement of the sensitivity of the resistors for the expected temperature measurement range.

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沉积Ti-Pt薄膜传感元件退火对石英晶体微天平的影响

本文讨论了退火热处理对石英晶体微天平(QCMs)沉积薄膜的影响，该薄膜将用于高温热重分析。所开发的qcm包括嵌入式沉积电阻，可以用作加热器或温度传感器，它们是通过双层Ti-Pt微膜的颗粒气相沉积制造的。文献中有证据表明，退火热处理会影响这类微膜的电阻和电阻热系数(TCR)，特别是在高温范围内。结果表明，在所分析的条件下，即退火温度在250°C至350^{\circ}\math {C}$之间变化时，电阻的TCR普遍增加，从而提高了电阻在预期温度测量范围内的灵敏度。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

2023 IEEE 10th International Workshop on Metrology for AeroSpace (MetroAeroSpace)

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