Multi quantum well (MQW) lasers at 1550 nm fabricated with a single epitaxial selective growth step by MOVPE without waveguide etching

T. van Caenegem, D. van Thourhout, P. van Daele, R. Baets, I. Moerman
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Abstract

MQW lasers have been fabricated by means of a single selective epitaxial growth and without waveguide etching. Flat layer interfaces have been obtained for a wide range of mask widths and mask openings while retaining material quality and providing wide bandgap tuning range through the use of QW's. Initial results show good laser performance at 1550 nm demonstrating the feasibility of the easy fabrication method for the realisation of more complex devices by means of active-passive integration.
在无波导刻蚀的情况下,利用MOVPE单外延选择性生长步骤制备了1550 nm的多量子阱激光器
采用单选择性外延生长和无波导刻蚀的方法制备了MQW激光器。通过使用QW,可以获得宽范围的掩模宽度和掩模开口的平面层界面,同时保持材料质量并提供宽的带隙调谐范围。初步结果表明,该器件在1550 nm处具有良好的激光性能,证明了该简单的制造方法通过主-被动集成实现更复杂器件的可行性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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