Planar waveguide devices on silicon

Abstract

A wide variety of planar optical waveguide devices were developed based on silica-glass-on-silicon technology. High-performance waveguides with low loss and precisely controlled geometry are formed on silicon substrates by a combination of flame hydrolysis deposition and photolithographic and reactive ion etching processes. This optical-fiber-compatible planar waveguide technology is flexible enough to provide a wide variety of high-performance and cost-effective optical devices such as branching, wavelength division multidemultiplexer, frequency control, switching and interconnection devices.<>