Fabrication of large-area PDMS triangle nanopillar arrays

Abstract

This paper presents an approach for fabricating periodic triangle nanopillar arrays by a combination of bilayer self-assembly, oxygen etching and poly (dimethylsiloxane) (PDMS) moulding. A bilayer of polystyrene (PS) nanospheres is used on a substrate as a template for replicating the PDMS nanostructure. The gaps in nanoscale is tuned by reducing the diameter of the top layer nanospheres using oxygen etching. Good uniformity is observed in the triangle structures. The feature size of the triangle structures can be tuned by controlling the etching time. The simplicity and low cost of this approach may make widespread applications of these PDMS nanopatterns.