Scattering from Diffraction Gratings in the Extreme Ultraviolet

Abstract

Characterization of the scattering behavior of diffraction gratings is critical for the design of spectrometers with good background rejection. The ability to compare grating scatter performance is essential as new grating manufacturing techniques are developed. Historically, scattering from diffraction gratings has been described in a plethora of functional schemes. These schemes are typically specific to the particular instrument or mounting in use, and they may not be used for ready comparison among gratings made by different processes or for analyzing a given grating used in various mountings.