Geometry Optimization on Mesa-Type Quartz Resonator

Abstract

A double mesa-type quartz resonator is firstly proposed. Quartz resonator plays an important role in the modern electronic communication. AT-cut quartz resonators operating in thickness-shear (TS) mode are widely used in making piezoelectric resonator for its good frequency and temperature characteristics. The vibration can be better confined in the mesa-type quartz resonator. Mesa-type and inverted mesa-type quartz resonators are studied. The performance of the quartz resonator are sensitive to the geometry shape of the quartz plate and the electrode. The height of the mesa are the key to the optimization. Both energy trapping effect and frequency drift are considered to evaluate the performance of the quartz resonator. After comparation and optimization, the model of the double mesa-type quartz resonator with an optimal the height of the mesa is finally obtained. It has better performance beyond mesa-type and inverted mesa-type quartz resonators.