Stress-induced leakage current in thin oxides under high-field impulse stressing

Abstract

Stress-induced leakage current (SILC) decreases when the time-between-pulses (T/sub bp/) of an AC-pulse waveform is increased. The amount of SILC reduction generally decreases for the same increase in T/sub bp/, with increasing stress voltage magnitude and stress pulse width. A model developed to describe the trap generation and relaxation processes occurring during transient high-field stress from unipolar and bipolar pulse waveforms is presented in this paper.