Piezoresistive Microcantilevers for Biomolecular Force Detection

G. Villanueva, G. Rius, J. Montserrat, F. Pérez-Murano, J. Bausells
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引用次数: 7

Abstract

This paper reports the development of piezoresistive microcantilevers for the detection of biomolecules by the measurement of intermolecular binding forces. The detection of the small forces involved in molecular recognition (<100 pN) requires cantilevers with a high force sensitivity and small spring constant. This can be obtained with cantilevers with submicron thickness and width in the micrometer range. We have fabricated polycrystalline silicon cantilevers in a dedicated technology and also in a commercial CMOS process. The cantilevers have been tested by applying a known displacement with an AFM instrument. For the CMOS-integrated cantilevers, which include on-chip amplifying circuits, a force sensitivity of 11 muV/pN and a force resolution of 27 pN have been measured.
用于生物分子力检测的压阻式微悬臂
本文报道了通过测量分子间结合力来检测生物分子的压阻式微悬臂梁的发展。检测分子识别中涉及的小力(<100 pN)需要具有高力灵敏度和小弹簧常数的悬臂梁。这可以用亚微米厚度和微米范围内宽度的悬臂梁来实现。我们已经在专用技术和商用CMOS工艺中制造了多晶硅悬臂梁。用AFM仪器对悬臂梁进行了已知位移测试。对于包含片上放大电路的cmos集成悬臂梁,测得的力灵敏度为11 muV/pN,力分辨率为27 pN。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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