Gas-lubricated micro-bearings for microactuators

Abstract

The advantages and scale-down of gas lubricated bearings are discussed. The effect of molecular mean free path on the bearing is considered. An aerodynamic spiral grooved microbearing and an externally pressurized microbearing have been designed and fabricated by processes derived from the IC fabrication process. They have been used in micromotors with a rotor diameter of 60 mu m and a hub diameter of 20 mu m.<>