Infrared absorption in proton- and deuteron-implanted semi-insulating Inp: Fe

Abstract

We have investigated hydrogen passivation in semi-insulating InP:Fe by implanting single crystal samples with 0.5 to 2.0 MeV protons and deuterons at fluences ranging from 1 x 10/sup 16/ to 5 x 10/sup 17/ cm/sup -2/. These implants give rise to a series of local vibrational modes (LVMs) in infrared absorption which are due to the stretching vibration of the bonds formed between phosphorus and the implanted atom in the vicinity of various lattice defects and impurities. Systematic variations in these LVMs are observed as a function of implant energy, fluence, and annealing temperature.