Effects of alloying elements (Pt or Co) on nickel-based contact technology for GeSn layers

Abstract

We have investigated the impact Pt or Co alloying have on Ni-based metallization in order to efficiently contact GeSn layers. In-situ X-ray diffraction (XRD), atomic force microscopy (AFM) and Sheet resistance (Rsh) measurements were performed. Solid-state reactions, surface morphology and electrical properties were studied, as a function of temperature annealing. Special attention was paid to differences depending on the alloying element.