Study of the von Mises stress in RF MEMS switch anchors

Abstract

In this paper an analysis of the von Mises stress in the RF MEMS switch structures is presented. This study was performed to analyze and optimize the stress in the anchors area for switch structures addressed to K and W frequency bands. Different types of anchors were taken into consideration and a comparison of von Mises stress has been performed. Optimization showed that it is possible to reduce stress up to more than 80% of its baseline, to the values much smaller than the breaking coefficient (100Mpa).