Behavior of semiconductor gas sensors with sol-gel sensing layer

Abstract

In this paper a sol-gel technique and SnO2 sensing layers prepared with this technique are presented. The tin dioxide sol was prepared of SnCl4 and deposited with spin coating method. The developed sensing layers have nanocrystalline structure and show excellent substrates adhesion. The gas sensor sensitivity strongly depends on thickness of deposited material. Probably, the large sensitivity of the semiconductor gas sensors is the result of conduction model of flat bands.