Characterization and reliability study of a MEMS mirror based on electrothermal bimorph actuation

2017 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2017-08-01 DOI:10.1109/OMN.2017.8051505

Haoran Wang, Xiaoyang Zhang, Daihua Zhang, Liang Zhou, Huikai Xie

引用次数: 3

Abstract

An electrothermal bimorph based MEMS mirror with large scan range, high fill factor and high resonant frequency is presented. A reliability issue due to burn-out of a bimorph thermal actuator is also studied and modeled.

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基于电热双晶片驱动的MEMS反射镜特性及可靠性研究

提出了一种基于电热双晶片的大扫描范围、高填充因数和高谐振频率的MEMS反射镜。研究了双晶片热致动器烧坏后的可靠性问题，并建立了模型。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

2017 International Conference on Optical MEMS and Nanophotonics (OMN)

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