Impact of RDL polymer on reliability of flip chip interconnects in thermal cycling — Correlation of experiments with finite element simulations

M. Muller, M. Wohrmann, O. Wittler, V. Bader, M. Topper, K. Lang
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引用次数: 2

Abstract

For WLP (Wafer Level Packaging) thin film polymers play a key role in respect to board level reliability. This paper introduces a reliability indicator giving a tendency of the polymer material to crack initiation around the UBM pad. This indicator derived from Finite Element simulated maximum stress in polymer layer and the material specific tensile strength. Comparing the simulation results with the experimental data we see the same impact of the mechanical material properties on the reliability. This proves the described reliability indicator as suitable for estimating thermal cycle reliability of RDL polymer materials gives application engineers and manufacturers a new tool for selecting the most suitable RDL material for e.g. flip chip and WLP applications.
热循环中RDL聚合物对倒装芯片互连可靠性的影响——实验与有限元模拟的相关性
对于WLP(晶圆级封装),薄膜聚合物在板级可靠性方面起着关键作用。本文介绍了一种可靠性指标,该指标反映了聚合物材料在UBM垫块周围起裂的趋势。该指标来源于有限元模拟聚合物层的最大应力和材料的比抗拉强度。将仿真结果与实验数据进行比较,发现材料力学性能对可靠性的影响是相同的。这证明了所描述的可靠性指标适用于估计RDL聚合物材料的热循环可靠性,为应用工程师和制造商选择最合适的RDL材料提供了新的工具,例如倒装芯片和WLP应用。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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