Monolithic CMOS/MEMS Spray Chip for Addressing Medical DNA Gene Sequence

Abstract

This paper describes an integrated logic timing CMOS control circuit and micro-electromechanical (MEMS) structure on a liquid-jet wafer. It can be a large current high voltage drive components. It is multi-level voltage output and ESD electrostatic protection circuit. It can be integrated with the liquid-jet actuator components of the wafer process. This research is to develop a low-process HDCI integrated process module. It combines MEMS architecture high-density high-frequency micro-flow structure (microflow architecture) design. It is coupled with the improvement in the accuracy of the liquid jet head package. The entire system is spray technology to the highest level. This technology is to provide the development of general jet printing products. It has a higher printing speed. It can be applied to the liquid spray technology to a more detailed level. This outlet velocity function is the power source that provides the Flow-3D calculation software as a jet of ejected monomer at 10μsec to 200μsec. It is through the simulation system to monitor the distribution of DNA droplet trajectories in outside of chamber and inside of ink chamber.