Characterization of a cMUT as a gas sensor for a fast-response electronic nose

Abstract

This work presents a characterization of CMUTs as promising candidates for a fast-response, miniaturized electronic nose. A complete setup has been designed, including MEMS chip and packaging, electromechanical valves and dedicated electronics. The measurements focus on the characterization of one channel to demonstrate satisfying sensitivities to some usual volatile organic compounds. The measurements exhibit fast-response to stimuli, highlighting how CMUTs could be a building block of an industrially suitable electronic nose.