Development of quartz tuning fork temperature sensors

Jun Xu, B. You, Xueqiong Zhao, Xin Li
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引用次数: 2

Abstract

A temperature sensing technique taking thermal sensitive quartz tuning fork vibration arm as sensitive components and output of digital frequency is presented. In the design of quartz tuning fork temperature sensor, selecting the cut type of quartz tuning fork according to the each anisotropic nature of quartz tuning fork, so that there is a linear relationship between quartz tuning fork frequency and environment temperature. Based on the principle of mechanical vibration, deriving differential equations of tuning fork resonator vibration, extracting characteristic parameters, analyzing the temperature-frequency characteristics, conducting optimum design of structure is performed. We evaluate the sensor through the established quartz tuning fork temperature sensor test system. The experimental results show that the sensor can work within -50square~+200square, the measurement accuracy is up to 0.05square, and it has a good long-term stability.
石英音叉温度传感器的研制
提出了一种以热敏石英音叉振动臂为敏感元件,输出数字频率的温度传感技术。在石英音叉温度传感器的设计中,根据石英音叉各向异性的性质,选择石英音叉的切割类型,使石英音叉频率与环境温度之间存在线性关系。基于机械振动原理,推导了音叉谐振器的振动微分方程,提取了音叉谐振器的特征参数,分析了音叉谐振器的温度-频率特性,进行了结构优化设计。通过建立的石英音叉温度传感器测试系统对传感器进行了评价。实验结果表明,该传感器可在-50平方~+200平方范围内工作,测量精度可达0.05平方,并具有良好的长期稳定性。
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