Low frequency noise in chemical vapor deposited MoS2

Yuji Wang, Xinhang Luo, Ningjiao Zhang, M. Laskar, Lu Ma, Yiying Wu, S. Rajan, W. Lu
{"title":"Low frequency noise in chemical vapor deposited MoS2","authors":"Yuji Wang, Xinhang Luo, Ningjiao Zhang, M. Laskar, Lu Ma, Yiying Wu, S. Rajan, W. Lu","doi":"10.1109/ARFTG-2.2013.6737358","DOIUrl":null,"url":null,"abstract":"Inherent low frequency noise is a ubiquitous phenomenon, which limits operation and performance of electronic devices and circuits. This limiting factor is very important for nanoscale electronic devices, such as 2D semiconductor devices. In this work, low frequency noise in high mobility single crystal MoS2 grown by chemical vapor deposition (CVD) is investigated. The measured low frequency noise follows an empirical formulation of mobility fluctuations with Hooge's parameter ranging between 1.44×10-3 and 3.51×10-2. Small variation of Hooge's parameter suggests superior material uniformity and processing control of CVD grown MoS2 devices than reported single-layer MoS2 FET. The extracted Hooge's parameter is one order of magnitude lower than CVD-grown graphene. The Hooge's parameter shows an inverse relationship with the field mobility.","PeriodicalId":290319,"journal":{"name":"82nd ARFTG Microwave Measurement Conference","volume":"106 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2013-10-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"82nd ARFTG Microwave Measurement Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ARFTG-2.2013.6737358","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 5

Abstract

Inherent low frequency noise is a ubiquitous phenomenon, which limits operation and performance of electronic devices and circuits. This limiting factor is very important for nanoscale electronic devices, such as 2D semiconductor devices. In this work, low frequency noise in high mobility single crystal MoS2 grown by chemical vapor deposition (CVD) is investigated. The measured low frequency noise follows an empirical formulation of mobility fluctuations with Hooge's parameter ranging between 1.44×10-3 and 3.51×10-2. Small variation of Hooge's parameter suggests superior material uniformity and processing control of CVD grown MoS2 devices than reported single-layer MoS2 FET. The extracted Hooge's parameter is one order of magnitude lower than CVD-grown graphene. The Hooge's parameter shows an inverse relationship with the field mobility.
化学气相沉积二硫化钼中的低频噪声
固有低频噪声是一种普遍存在的现象,它限制了电子器件和电路的工作和性能。这个限制因素对于纳米级电子器件,如二维半导体器件是非常重要的。本文研究了化学气相沉积法(CVD)生长高迁移率二硫化钼单晶中的低频噪声。测量的低频噪声遵循迁移率波动的经验公式,Hooge参数范围在1.44×10-3和3.51×10-2之间。Hooge参数的微小变化表明CVD生长的MoS2器件比单层MoS2 FET具有更好的材料均匀性和工艺控制。提取的胡格参数比cvd生长的石墨烯低一个数量级。胡格参数与电场迁移率呈反比关系。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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