Chung-Yuan Chang, Cheng Ching Hsu, T. Rawat, Shi-Wei Chen, A. Lin
{"title":"Human machine competition in intelligent laser manufacturing in semiconductor processes","authors":"Chung-Yuan Chang, Cheng Ching Hsu, T. Rawat, Shi-Wei Chen, A. Lin","doi":"10.1117/12.2632661","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":228301,"journal":{"name":"Optical Manufacturing and Testing XIV","volume":"110 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-11-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optical Manufacturing and Testing XIV","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2632661","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}