Optical Manufacturing and Testing XIV

Human machine competition in intelligent laser manufacturing in semiconductor processes

Pub Date : 2022-11-08 DOI: 10.1117/12.2632661 Chung-Yuan Chang, Cheng Ching Hsu, T. Rawat, Shi-Wei Chen, A. Lin

Front Matter: Volume 12221

Pub Date : 2022-10-18 DOI: 10.1117/12.2661669

Polymer coating-based contaminant control/elimination for NASA's Exo-S starshade probe and space telescopes (Conference Presentation)

Pub Date : 2022-10-03 DOI: 10.1117/12.2646368 James P. Hamilton, K. Horne, M. Levenstein, Brandon Robinson, Alan Wakefield, Katie Lameyer, A. Rickertsen, Madison Meuth, Noah P. Milder, Adam Wildman, MaryAnn Moran, Ethan Taylor