S. Venica, F. Driussi, A. Gahoi, S. Kataria, P. Palestri, Max C. Lenirne, Luca Scimi
{"title":"Reliability analysis of the metal-graphene contact resistance extracted by the transfer length method","authors":"S. Venica, F. Driussi, A. Gahoi, S. Kataria, P. Palestri, Max C. Lenirne, Luca Scimi","doi":"10.1109/ICMTS.2018.8383765","DOIUrl":null,"url":null,"abstract":"The transfer Length Method is a well-estab experimental technique to characterize the contact resista semiconductor devices. However, its dependability is ques for metal-graphene contacts. We investigate in-depth the si cal error of the extracted contact resistance values and we strategies to limit such error and to obtain reliable result method has been successfully applied to samples with dil contact metals.","PeriodicalId":271839,"journal":{"name":"2018 IEEE International Conference on Microelectronic Test Structures (ICMTS)","volume":"21 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2018-03-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"6","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 IEEE International Conference on Microelectronic Test Structures (ICMTS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICMTS.2018.8383765","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 6
Abstract
The transfer Length Method is a well-estab experimental technique to characterize the contact resista semiconductor devices. However, its dependability is ques for metal-graphene contacts. We investigate in-depth the si cal error of the extracted contact resistance values and we strategies to limit such error and to obtain reliable result method has been successfully applied to samples with dil contact metals.