A system design method of micro-g silicon accelerometer with a CMOS precision interface circuit

Abstract

In this paper, a system design method of micro-g silicon accelerometer with a CMOS precision interface circuit is presented. It contains the detail design steps in order to directing the design process, and also gives system level understand of the relation between the fabrication architecture of silicon accelerometer, which is transformed into equivalent circuit, and its interface circuit (signal detection circuit). At last, an electronics system architecture uniting the accelerometer equivalent circuit with the interface circuit that can be implemented in CMOS process is presented.