Modeling of MEMS based Surface Acoustic Wave-Gas Sensor to Obtain Enhanced Sensitivity

Abstract

Modeling and analysis of surface acoustic wave (SAW) based volatile gas sensor is highlighted here. Sensing phenomenon is relying on mass loading effect. Modeling is performed in COMSOL MULTYPHYSICS by considering finite element modeling. Sensing performance is investigated by analyzing he resonant frequency on exposure of target analyte at different concentration. Change in resonant frequency determines the sensitivity. High sensitivity is observed during the investigation.