K. Ohwada, Yochi Mochida, H. Kawai
{"title":"Micromachined Silicon Gyroscope","authors":"K. Ohwada, Yochi Mochida, H. Kawai","doi":"10.1002/1616-8984(199911)6:1<95::AID-SEUP95>3.0.CO;2-7","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":154848,"journal":{"name":"Sensors Update","volume":"358 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1999-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Sensors Update","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1002/1616-8984(199911)6:1<95::AID-SEUP95>3.0.CO;2-7","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1