Thermal management analysis of high-power electronic modules using Cu bonded AlN substrates

N. Tatoh, Y. Hirose, M. Nagai, K. Sasaki, N. Tatsumi, K. Higaki, H. Nakata, T. Tomikawa
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引用次数: 8

Abstract

We have successfully developed a thermal management analysis technique that consists of computer simulation based on experimental data, to assume temperatures of high-power electronic modules using Cu bonded AlN substrates, which are used in electric vehicles (EVs) and hybrid electric vehicles (HEVs). An experimental system emulating a high power electronic module was assembled. With increasing electrical power, we observed a positive nonlinearity between the temperature on heaters and the input power. In order to explain this nonlinearity, we ascertained two important factors, the warpage of the substrate and the pore rate inside the Si-grease between the substrate and the Al plate. For ascertaining the warpage due to thermal stress, a movement of reflectance laser beam from a mirror put on the substrate was measured. We determined the pore rate of Si- grease by measuring the pore size inside the grease sandwiched between a clear glass plate and an Al plate on a heated plate. Inputting the pore rate into thermal-strain-interaction simulation, the calculated temperature was consistent with the experimental temperature within an error of less than 3 deg. C at a high power operation of 900 W.
采用Cu键合AlN基板的大功率电子模块热管理分析
我们已经成功开发了一种热管理分析技术,该技术由基于实验数据的计算机模拟组成,以假设用于电动汽车(ev)和混合动力汽车(hev)的使用Cu键合AlN衬底的大功率电子模块的温度。搭建了仿真大功率电子模块的实验系统。随着电功率的增大,加热器上的温度与输入功率呈正非线性关系。为了解释这种非线性,我们确定了两个重要因素,即衬底的翘曲和衬底与Al板之间硅脂的孔隙率。为了确定由于热应力引起的翘曲,测量了从衬底上的镜子反射激光束的运动。我们通过测量夹在透明玻璃板和加热板上的铝板之间的硅脂的孔隙大小来确定硅脂的孔隙率。将孔隙率输入到热-应变相互作用模拟中,在900 W的高功率下,计算温度与实验温度一致,误差小于3℃。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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