Overlay mark sub structure design to improve the contrast

Libin Zhang, Cong Lu, Yaobin Feng, Yayi Wei, Xiaojing Su, Le Ma, Lisong Dong
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引用次数: 1

Abstract

The contrast of image based overlay (IBO) plays an important role during overlay mark metrology. For advanced lithography nodes, it is better to implement sub structures for the IBO mark to make the patterning process friendly. However, the sub structures may decrease the image contrast and lead to metrology errors and challenges of mark recognition for the overlay tools. In this paper, a theoretical analysis was conducted to simulate the IBO marks contrast in relation with different structural designs of the marks. The result provides a potential solution for the IBO contrast enhancement.
叠层标记子结构设计,提高对比度
基于图像的叠加对比度在叠加标记测量中起着重要的作用。对于先进的光刻节点,最好实现IBO标记的子结构,以使图案过程友好。然而,这些子结构会降低图像对比度,导致测量误差,给叠加工具的标记识别带来挑战。本文通过理论分析模拟了IBO标志在不同结构设计下的对比。该结果为IBO对比度增强提供了一种潜在的解决方案。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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