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Influence of Plasma Species on the Growth Mode and Material Properties of Indium Nitride Grown by Plasma-Assisted Atomic Layer Epitaxy.

Proposed for presentation at the ALD 2021 held June 27-30, 2021 in Tampa, FL. Pub Date : 2021-04-01 DOI:10.2172/1862766
J. Woodward, Samantha Rosenberg, D. Boris, S. Johnson, Z. Robinson, M. Mastro, K. Ludwig, Charles R Eddy Jr., J. Hite
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等离子体种类对等离子体辅助原子层外延生长氮化铟的生长方式和材料性能的影响。
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Proposed for presentation at the ALD 2021 held June 27-30, 2021 in Tampa, FL.
Proposed for presentation at the ALD 2021 held June 27-30, 2021 in Tampa, FL.
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