The properties of micromechanical resonator

Proceedings of 4th International Conference on Solid-State and IC Technology Pub Date : 1995-10-24 DOI:10.1109/ICSICT.1995.503325

Zhoughe Jin, Yaolin Wang, Yigang Xu, Chung Ding

引用次数: 5

Abstract

A theoretical and experimental study is presented on the response of a micromechanical resonator. Emphasis is placed on the study of double frequency and nonlinear behaviour.

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微机械谐振器的特性

对微机械谐振器的响应进行了理论和实验研究。重点放在双频和非线性行为的研究。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Proceedings of 4th International Conference on Solid-State and IC Technology

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